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First measurements of the number size distribution of 1–2 nm aerosol particles released from manufacturing processes in a cleanroom environment
| Content Provider | Scilit |
|---|---|
| Author | Ahonen, L. R. Kangasluoma, J. Lammi, J. Lehtipalo, K. Hämeri, K. Petäjä, T. Kulmala, M. |
| Copyright Year | 2017 |
| Description | Journal: Aerosol Science and Technology This study was conducted to observe a potential formation and/or release of aerosol particles related to manufacturing processes inside a cleanroom. We introduce a novel technique to monitor airborne sub 2 nm particles in the cleanroom and present results from a measurement campaign during which the total particle number concentration (>1 nm and >7 nm) and the size resolved concentration in the 1 to 2 nm size range were measured. Measurements were carried out in locations where atomic layer deposition (ALD), sputtering, and lithography processes were conducted, with a wide variety of starting materials. During our campaign in the clean room, we observed several time periods when the particle number concentration was $10^{5}$ $cm^{−3}$ in the sub 2 nm size range and $10^{4}$ $cm^{−3}$ in the size class larger than 7 nm in one of the sampling locations. The highest concentrations were related to the maintenance processes of the manufacturing machines, which were conducted regularly in that specific location. Our measurements show that around 500 $cm^{−3}$ sub 2 nm particles or clusters were in practice always present in this specific cleanroom, while the concentration of particles larger than 2 nm was less than 2 $cm^{−3}$. During active processes, the concentrations of sub 2 nm particles could rise to over $10^{5}$ $cm^{−3}$ due to an active new particle formation. The new particle formation was most likely induced by a combination of the supersaturated vapors, released from the machines, and the very low existing condensation sink, leading to pretty high formation rates $J_{1.4 nm}$ = (9 ± 4) $cm^{−3}$ $s^{−1}$ and growth rates of particles $(GR_{1.1–1.3 nm}$ = (6 ± 3) nm/h and $GR_{1.3–1.8 nm}$ = (14 ± 3) nm/h). Copyright © 2017 American Association for Aerosol Research |
| Related Links | https://www.tandfonline.com/doi/pdf/10.1080/02786826.2017.1292347?needAccess=true |
| Ending Page | 693 |
| Page Count | 9 |
| Starting Page | 685 |
| ISSN | 02786826 |
| e-ISSN | 15217388 |
| DOI | 10.1080/02786826.2017.1292347 |
| Journal | Aerosol Science and Technology |
| Issue Number | 6 |
| Volume Number | 51 |
| Language | English |
| Publisher | Informa UK Limited |
| Publisher Date | 2017-03-08 |
| Access Restriction | Open |
| Subject Keyword | Journal: Aerosol Science and Technology Atmospheric Sciences Jingkun Jiang |
| Content Type | Text |
| Subject | Environmental Chemistry Pollution Materials Science |
