NDLI: Microfabrication Processes for Silicon and Glass Chips

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Microfabrication Processes for Silicon and Glass Chips

Content Provider	Scilit
Author	Ning, Yuebin Fitzpatrick, Glen
Copyright Year	2001
Description	Microfabrication technology, also known as micromachining, refers to the fabrication processes employed in the manufacture of microelectromechanical systems (MEMSs) and is the foundation of the manufacturing processes for silicon and glass-based chemical and biological microchips. Within the realm of microfabrication technology, there are a number of approaches that have been utilized in fabricating chemical and biological microchips. These approaches can be broadly divided into two categories: (1) Microfluidic technology, which uses all facets of the microfabrication processes to create 3D structures for chemical reactions and separations through the manipulation of fluid movement; and (2) Microarray technology, which uses microlithography, contact, or drop-on-demand printing to form 2D biologically active arrays on flat substrate surfaces for biological assays. Book Name: Biochip Technology
Related Links	https://content.taylorfrancis.com/books/download?dac=C2006-0-15433-4&isbn=9780429190704&doi=10.1201/9781482283662-6&format=pdf
Ending Page	56
Page Count	24
Starting Page	33
DOI	10.1201/9781482283662-6
Language	English
Publisher	Informa UK Limited
Publisher Date	2001-07-31
Access Restriction	Open
Subject Keyword	Book Name: Biochip Technology Biomedical Engineering Technology Silicon Manufacture Biological Structures Microchips Microfabrication Processes
Content Type	Text
Resource Type	Chapter

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