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A new form measurement system based on subaperture stitching with a line-scanning interferometer
| Content Provider | Scilit |
|---|---|
| Author | Laubach, Sören Ehret, Gerd Riebeling, Jörg Lehmann, Peter |
| Copyright Year | 2016 |
| Abstract | A new optical form measurement system for almost rotational symmetric surfaces has been set up. It is based on an interferometric line sensor applying sinusoidal path length modulation in combination with a movement system. With this system, ring-shaped subapertures of the specimens are measured. The system is especially suitable for measuring spheres and aspheres with a broad range of radii (r>50 mm). The individual subapertures are stitched together to yield the full 3D topography. Because the rotation of the specimen by more than 360° has to yield the same results, inherent consistency tests are possible. Example measurements of a sphere are shown and discussed. Reproducibility measurements for one ring scan performed with the system show a standard deviation of 14 nm. The system can be set up at a moderate price as off-the-shelf mechanical and optoelectronic devices can be used. Future improvements of the system are discussed. |
| Related Links | http://www.degruyter.com/downloadpdf/j/aot.ahead-of-print/aot-2016-0039/aot-2016-0039.xml |
| ISSN | 21928576 |
| e-ISSN | 21928584 |
| DOI | 10.1515/aot-2016-0039 |
| Journal | Advanced Optical Technologies |
| Issue Number | 5-6 |
| Volume Number | 5 |
| Language | English |
| Publisher | Walter de Gruyter GmbH |
| Publisher Date | 2016-01-01 |
| Access Restriction | Open |
| Subject Keyword | Advanced Optical Technologies Instrumentation Optics Form Measurement Interferometry Metrology Journal: Advanced Optical Technologies, Issue- 3 |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Instrumentation Electronic, Optical and Magnetic Materials |
