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Optical properties of AlN layers obtained by magnetron sputtering
| Content Provider | Scilit |
|---|---|
| Author | Potera, Piotr Wisz, Grzegorz Szyller, Łukasz |
| Copyright Year | 2018 |
| Abstract | The growth of AlN layers on glass substrates using magnetron sputtering method was performed and the grown layers were subjected to optical measurements. Transmission spectra of the layers grown at different content of N2 in the atmosphere were obtained. The transmission spectra as well as energy gap depended on N2 content. The annealing of the layers in air led to transmission changes and influenced energy gap and refractive index values. |
| Related Links | https://content.sciendo.com/downloadpdf/journals/msp/36/4/article-p717.pdf https://content.sciendo.com/downloadpdf/journals/msp/ahead-of-print/article-10.2478-msp-2018-0087.pdf |
| Ending Page | 721 |
| Page Count | 5 |
| Starting Page | 717 |
| ISSN | 20831331 |
| e-ISSN | 2083134X |
| DOI | 10.2478/msp-2018-0087 |
| Journal | Materials Science-Poland |
| Issue Number | 4 |
| Volume Number | 36 |
| Language | English |
| Publisher | Walter de Gruyter GmbH |
| Publisher Date | 2018-12-01 |
| Access Restriction | Open |
| Subject Keyword | Materials Science-poland Condensed Matter Physics Grown Annealing Refractive Substrates Aln Layers Magnetron Sputtering Journal: Materials Science-Poland, Vol- 36, Issue- 1 |
| Content Type | Text |
| Resource Type | Article |
| Subject | Mechanics of Materials Condensed Matter Physics Materials Science Mechanical Engineering |
