NDLI: Quantitative SEM-EDS Analysis of Semi-Transparent Samples

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Quantitative SEM-EDS Analysis of Semi-Transparent Samples

Content Provider	Scilit
Author	Boona, S. R.
Copyright Year	2021
Description	Recent years have seen increased crossover of microscopy techniques developed for transmission electron microscopes (TEMs) being utilized as well in scanning electron microscopes (SEMs). The order of magnitude lower beam energies available in SEMs correspond with significantly different beam-sample interactions that must be accounted for when examining freestanding films. This is especially important for composition analysis via energy dispersive X-ray spectroscopy (EDS) since lower-energy transmission experiments mean X-ray volumes become comparable to sample dimensions. To better understand this scenario, we report results of an SEM-EDS study of terraced freestanding films comprising binary compounds with well-defined atomic ratios. Guided by Monte Carlo simulations, EDS line scan data were collected at different beam energies across segments of varying thicknesses. The results of quantification analysis using different models are compared for multiple combinations of beam energy, sample thickness, and material density, from which some general guidelines are provided for SEM-EDS analysis of freestanding films.
Related Links	https://www.cambridge.org/core/services/aop-cambridge-core/content/view/981AEA0AC220BD478248686FE1C3F7CD/S1551929520001790a.pdf/div-class-title-quantitative-sem-eds-analysis-of-semi-transparent-samples-div.pdf
Ending Page	48
Page Count	7
Starting Page	42
ISSN	15519295
e-ISSN	21503583
DOI	10.1017/s1551929520001790
Journal	Microscopy Today
Issue Number	1
Volume Number	29
Language	English
Publisher	Cambridge University Press (CUP)
Publisher Date	2021-01-01
Access Restriction	Open
Subject Keyword	Microscopy Today Microscopic Research Scanning Electron Microscopy ray Spectroscopy transparency
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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