NDLI: Re-crystallisation of Amorphous Silicon in the Production of Low Defect Density Silicon on Sapphire Thin Films

Content Provider	Scilit
Author	McKenzie, W. R. Domyo, H. Ho, T. Munroe, P. R.
Copyright Year	2005
Related Links	https://www.cambridge.org/core/services/aop-cambridge-core/content/view/EDAAB429887B6E3B24B02AF13BF6105B/S1431927605500503a.pdf/div-class-title-re-crystallisation-of-amorphous-silicon-in-the-production-of-low-defect-density-silicon-on-sapphire-thin-films-div.pdf
Ending Page	2089
Page Count	2
Starting Page	2088
ISSN	14319276
e-ISSN	14358115
DOI	10.1017/s1431927605500503
Journal	Microscopy and Microanalysis
Issue Number	S02
Volume Number	11
Language	English
Publisher	Cambridge University Press (CUP)
Publisher Date	2005-08-01
Access Restriction	Open
Subject Keyword	Microscopy and Microanalysis Nuclear Energy and Engineering Amorphous Silicon
Content Type	Text
Resource Type	Article
Subject	Instrumentation

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Re-crystallisation of Amorphous Silicon in the Production of Low Defect Density Silicon on Sapphire Thin Films