Loading...
Please wait, while we are loading the content...
Similar Documents
Electromagnetic and small-signal modeling of an encapsulated RF-MEMS switch for D-band applications
| Content Provider | Scilit |
|---|---|
| Author | Wipf, Selin Tolunay Göritz, Alexander Wietstruck, Matthias Wipf, Christian Tillack, Bernd Mai, Andreas Kaynak, Mehmet |
| Copyright Year | 2017 |
| Description | In this work, an electromagnetic (EM) model and a small-signal (lumped-element) model of a wafer-level encapsulated (WLE) radio frequency microelectromechanical systems (RF-MEMS) switch is presented. The EM model of the WLE RF-MEMS switch is developed to estimate its RF performance. After the fabrication of the switch, the EM model is used to get accurate S-parameter simulation results. Alternative to the EM model, a small-signal model of the fabricated WLE RF-MEMS switch is developed. The developed model is integrated into a 0.13 µm SiGe BiCMOS process technology design kit for fast simulations and to predict the RF performance of the switch from a pure electrical point of view. The 0.13 µm SiGe BiCMOS embedded WLE RF-MEMS shows beyond state-of-the-art measured RF performances in D-band (110–170 GHz) and provides a high capacitance $C_{on}/C_{off}$ratio of 11.1. The results of the both EM model and small-signal model of the switch are in very good agreement with the S-parameter measurements in D-band. The measured maximum isolation of the WLE RF-MEMS switch is 51.6 dB at 142.8 GHz with an insertion loss of 0.65 dB. |
| Related Links | https://depositonce.tu-berlin.de/bitstream/11303/9093/1/tolunay_etal_2017.pdf https://www.cambridge.org/core/services/aop-cambridge-core/content/view/8B0D1B955282AC4CECCA1C8ADF3E3042/S1759078717000137a.pdf/div-class-title-electromagnetic-and-small-signal-modeling-of-an-encapsulated-rf-mems-switch-for-d-band-applications-div.pdf |
| Ending Page | 1278 |
| Page Count | 8 |
| Starting Page | 1271 |
| ISSN | 17590787 |
| e-ISSN | 17590795 |
| DOI | 10.1017/s1759078717000137 |
| Journal | International Journal of Microwave and Wireless Technologies |
| Issue Number | 6 |
| Volume Number | 9 |
| Language | English |
| Publisher | Cambridge University Press (CUP) |
| Publisher Date | 2017-07-01 |
| Access Restriction | Open |
| Subject Keyword | International Journal of Microwave and Wireless Technologies Monolithic Integration |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
