NDLI: Focused Ion Beam Sample Preparation of Complex Devices

Content Provider	Scilit
Author	Russell, P. E. Bunker, K. L. Garcia, R. Stark, T. J. Vitarelli, J. P.
Copyright Year	2005
Related Links	https://www.cambridge.org/core/services/aop-cambridge-core/content/view/CF129E8DA03609017B75E97E5F7E28BC/S1431927605501284a.pdf/div-class-title-focused-ion-beam-sample-preparation-of-complex-devices-div.pdf
Ending Page	89
Page Count	2
Starting Page	88
ISSN	14319276
e-ISSN	14358115
DOI	10.1017/s1431927605501284
Journal	Microscopy and Microanalysis
Issue Number	S02
Volume Number	11
Language	English
Publisher	Cambridge University Press (CUP)
Publisher Date	2005-08-01
Access Restriction	Open
Subject Keyword	Microscopy and Microanalysis Analytical Chemistry Ion Beam Sample Preparation Beam Sample Focused Ion Extended Abstract Complex Devices Devices Extended
Content Type	Text
Resource Type	Article
Subject	Instrumentation

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Focused Ion Beam Sample Preparation of Complex Devices