NDLI: Demonstration of Sputtering Atomic Layer Augmented Deposition: Aluminum Oxide–Copper Dielectric

Content Provider	Scilit
Author	Giraldo, Brian Fryauf, David Mark Cheney, Brandon Sands, Jacob H. Kobayashi, Nobuhiko Paul
Copyright Year	2020
Related Links	http://arxiv.org/pdf/1905.00584
Ending Page	14288
Page Count	9
Starting Page	14280
ISSN	19448244
e-ISSN	19448252
DOI	10.1021/acsami.9b18628
Journal	ACS Applied Materials & Interfaces
Issue Number	12
Volume Number	12
Language	English
Publisher	American Chemical Society (ACS)
Publisher Date	2020-03-25
Access Restriction	Open
Subject Keyword	Journal: ACS Applied Materials & Interfaces Coatings and Films Aluminum Oxide Atomic Layer Deposition
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Medicine

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Demonstration of Sputtering Atomic Layer Augmented Deposition: Aluminum Oxide–Copper Dielectric–Metal Nanocomposite Thin Films