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| Content Provider | PubMed Central |
|---|---|
| Author | Cinar, Eyup Sahin, Ferat Yablon, Dalia |
| Editor | Glatzel, Thilo |
| Copyright Year | 2015 |
| Abstract | A novel instrumentation approach to nanoindentation is described that exhibits improved resolution and depth sensing. The approach is based on a multi-probe scanning probe microscopy (SPM) tool that utilizes tuning-fork based probes for both indentation and depth sensing. Unlike nanoindentation experiments performed with conventional AFM systems using beam-bounce technology, this technique incorporates a second probe system with an ultra-high resolution for depth sensing. The additional second probe measures only the vertical movement of the straight indenter attached to a tuning-fork probe with a high spring constant and it can also be used for AFM scanning to obtain an accurate profiling. Nanoindentation results are demonstrated on silicon, fused silica, and Corning Eagle Glass. The results show that this new approach is viable in terms of accurately characterizing mechanical properties of materials through nanoindentation with high accuracy, and it opens doors to many other exciting applications in the field of nanomechanical characterization. |
| Related Links | http://dx.doi.org/10.3762/bjnano.6.205 |
| Ending Page | 2027 |
| Page Count | 13 |
| Starting Page | 2015 |
| File Format | |
| ISSN | 21904286 |
| e-ISSN | 21904286 |
| Journal | Beilstein Journal of Nanotechnology |
| Volume Number | 6 |
| Language | English |
| Publisher | Beilstein-Institut |
| Publisher Date | 2015-10-01 |
| Access Restriction | Open |
| Rights Holder | Beilstein-Institut |
| Subject Keyword | Research in Higher Education |
| Content Type | Text |
| Resource Type | Article |
| Subject | Nanoscience and Nanotechnology Physics and Astronomy Electrical and Electronic Engineering |
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