NDLI: Dynamic Characteristics of Micro-Beams Considering the Effect of Flexible Supports

Content Provider	PubMed Central
Author	Zhong, Zuo-yang Zhang, Wen-ming Meng, Guang
Copyright Year	2013
Abstract	Normally, the boundaries are assumed to allow small deflections and moments for MEMS beams with flexible supports. The non-ideal boundary conditions have a significant effect on the qualitative dynamical behavior. In this paper, by employing the principle of energy equivalence, rigorous theoretical solutions of the tangential and rotational equivalent stiffness are derived based on the Boussinesq's and Cerruti's displacement equations. The non-dimensional differential partial equation of the motion, as well as coupled boundary conditions, are solved analytically using the method of multiple time scales. The closed-form solution provides a direct insight into the relationship between the boundary conditions and vibration characteristics of the dynamic system, in which resonance frequencies increase with the nonlinear mechanical spring effect but decrease with the effect of flexible supports. The obtained results of frequencies and mode shapes are compared with the cases of ideal boundary conditions, and the differences between them are contrasted on frequency response curves. The influences of the support material property on the equivalent stiffness and resonance frequency shift are also discussed. It is demonstrated that the proposed model with the flexible supports boundary conditions has significant effect on the rigorous quantitative dynamical analysis of the MEMS beams. Moreover, the proposed analytical solutions are in good agreement with those obtained from finite element analyses.
Related Links	http://dx.doi.org/10.3390/s131215880
Ending Page	15897
Page Count	18
Starting Page	15880
File Format	PDF
ISSN	14248220
e-ISSN	14248220
Journal	Sensors (Basel, Switzerland)
Issue Number	12
Volume Number	13
Language	English
Publisher	Molecular Diversity Preservation International (MDPI)
Publisher Date	2013-11-01
Access Restriction	Open
Rights Holder	Molecular Diversity Preservation International (MDPI)
Subject Keyword	Electrical and Electronic Engineering Analytical Chemistry Atomic and Molecular Physics, and Optics Biochemistry Research in Higher Education
Content Type	Text
Resource Type	Article
Subject	Medicine Atomic and Molecular Physics, and Optics Instrumentation Analytical Chemistry Biochemistry Information Systems Electrical and Electronic Engineering

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