NDLI: Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

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Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

Content Provider	MDPI
Author	Hillmer, Hartmut Woidt, Carsten Istock, André Kobylinskiy, Aliaksei Nguyen, Duc Toan Ahmed, Naureen Brunner, Robert Kusserow, Thomas
Copyright Year	2021
Description	Optical spectrometers and sensors have gained enormous importance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry–Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters. The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.
Starting Page	164
e-ISSN	20794991
DOI	10.3390/nano11010164
Journal	Nanomaterials
Issue Number	1
Volume Number	11
Language	English
Publisher	MDPI
Publisher Date	2021-01-11
Access Restriction	Open
Subject Keyword	Nanomaterials Telecommunications Nanoimprint Photonic Nanomaterials Optical Spectrometers Interferometers Fabry–pérot Filters Detector Arrays Tunable Mems Linewidth Miniaturization
Content Type	Text
Resource Type	Article

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