NDLI: Computational Characterization of Microwave Planar Cutoff Probes for Non-Invasive Electron Density Measurement in Low-Temperature Plasma: Ring- and Bar-Type Cutoff Probes

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Computational Characterization of Microwave Planar Cutoff Probes for Non-Invasive Electron Density Measurement in Low-Temperature Plasma: Ring- and Bar-Type Cutoff Probes

Content Provider	MDPI
Author	Kim, Si Jun Lee, Jang Jae Lee, Young Seok Yeom, Hee Jung Lee, Hyo Chang Kim, Jung-Hyung You, Shin Jae
Copyright Year	2020
Description	The microwave planar cutoff probe, recently proposed by Kim et al. is designed to measure the cutoff frequency in a transmission (S21) spectrum. For real-time electron density measurement in plasma processing, three different types have been demonstrated: point-type, ring-type (RCP), and bar-type (BCP) planar cutoff probes. While Yeom et al. has shown that the RCP and BCP are more suitable than the point-type probe for process monitoring, the basic characteristics of the ring- and bar-type probes have yet to be investigated. The current work includes a computational characterization of a RCP and BCP with various geometrical parameters, as well as a plasma parameter, through a commercial three-dimensional electromagnetic simulation. The parameters of interest include antenna size, antenna distance, dielectric thickness of the transmission line, and input electron density. Simulation results showed that the RCP has several resonance frequencies originating from standing-wave resonance in the S21 spectrum that the BCP does not. Moreover, the S21 signal level increased with antenna size and dielectric thickness but decreased with antenna distance. Among the investigated parameters, antenna distance was found to be the most important parameter to improve the accuracy of both RCP and BCP.
Starting Page	7066
e-ISSN	20763417
DOI	10.3390/app10207066
Journal	Applied Sciences
Issue Number	20
Volume Number	10
Language	English
Publisher	MDPI
Publisher Date	2020-10-12
Access Restriction	Open
Subject Keyword	Applied Sciences Telecommunications Plasma Diagnostics Electron Density Measurement Planar Microwave Cutoff Probe Bar-type Cutoff Probe Ring-type Cutoff Probe Computational Characterization
Content Type	Text
Resource Type	Article

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