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Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient $Al_{x}Ti_{1−x}$N Coatings
| Content Provider | MDPI |
|---|---|
| Author | Jan, Michalička Ronald, Weißenbacher Zalesak, Jakub Todt, Juraj Sartory, Bernhard Matko, Igor Lessiak, Mario Traxler, Margarethe Pitonak, Reinhard Gammer, Christoph Keckes, Jozef |
| Copyright Year | 2021 |
| Description | The correlation between structural properties of Al-rich self-assembled nano-lamellar Al x Ti1−x N coatings and process parameters used during their chemical vapor deposition (CVD) remains unexplored. For this article, two gradient Al x Ti1−x N coatings were prepared by a stepwise increase in temperature and pressure in the ranges of 750–860 °C and 1.56 to 4.5 kPa during the depositions at a constant composition of the process gas mixture. The cross-sectional properties of the coatings were analyzed using X-ray nanodiffraction (CSnanoXRD) and electron microscopy. Experimental results indicate that the variation of the process parameters results in changes in microstructure, grain morphology, elastic strain, nanolamellae’s chemistry and bi-layer period. At temperatures of ~750–800 °C and pressures of 2.5–4.5 kPa, preferably cubic nanolamellar grains are formed, whose microstructure correlates with the build-up of tensile stresses, which become relaxed in coating regions filled with nanocrystalline grains. CSnanoXRD superlattice satellite reflections indicate the period of the cubic Al(Ti)N-Ti(Al)N bilayers, which changes from 6.7 to 9 nm due to the temperature increase from 750 to ~810 °C, while it remains nearly unaffected by the pressure variation. In summary, our study documents that CVD process parameters can be used to tune microstructural properties of self-assembled Al x Ti1−x N nanolamellae as well as the coatings’ grain morphology. |
| Starting Page | 416 |
| e-ISSN | 20796412 |
| DOI | 10.3390/coatings11040416 |
| Journal | Coatings |
| Issue Number | 4 |
| Volume Number | 11 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2021-04-03 |
| Access Restriction | Open |
| Subject Keyword | Coatings Coatings and Films Protective Coating Tialn Self-assembly Lp-cvd Tem X-ray Nanodiffraction |
| Content Type | Text |
| Resource Type | Article |
