NDLI: Novel Abrasive-Impregnated Pads and Diamond Plates for the Grinding and Lapping of Single-Crystal Silicon Carbide Wafers

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Novel Abrasive-Impregnated Pads and Diamond Plates for the Grinding and Lapping of Single-Crystal Silicon Carbide Wafers

Content Provider	MDPI
Author	Tsai, Ming-Yi Li, Kun-Ying Ji, Sun-Yu
Copyright Year	2021
Description	In this study, special ceramic grinding plates impregnated with diamond grit and other abrasives, as well as self-made lapping plates, were used to prepare the surface of single-crystal silicon carbide (SiC) wafers. This novel approach enhanced the process and reduced the final chemical mechanical planarization (CMP) polishing time. Two different grinding plates with pads impregnated with mixed abrasives were prepared: one with self-modified diamond + SiC and a ceramic binder and one with self-modified diamond + SiO2 + Al2O3 + SiC and a ceramic binder. The surface properties and removal rate of the SiC substrate were investigated and a comparison with the traditional method was conducted. The experimental results showed that the material removal rate (MRR) was higher for the SiC substrate with the mixed abrasive lapping plate than for the traditional method. The grinding wear rate could be reduced by 31.6%. The surface roughness of the samples polished using the diamond-impregnated lapping plate was markedly better than that of the samples polished using the copper plate. However, while the surface finish was better and the grinding efficiency was high, the wear rate of the mixed abrasive-impregnated polishing plates was high. This was a clear indication that this novel method was effective and could be used for SiC grinding and lapping.
Starting Page	1783
e-ISSN	20763417
DOI	10.3390/app11041783
Journal	Applied Sciences
Issue Number	4
Volume Number	11
Language	English
Publisher	MDPI
Publisher Date	2021-02-17
Access Restriction	Open
Subject Keyword	Applied Sciences Manufacturing Engineering Chemical Mechanical Polishing Single-crystal Silicon Carbide Polishing Plate Resin Pads Diamond Grit
Content Type	Text
Resource Type	Article

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