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Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer
| Content Provider | MDPI |
|---|---|
| Author | Li, Chen Zhang, Chi Yang, Lijun Guo, Fangtong |
| Copyright Year | 2022 |
| Description | At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure, the sensitivity of the pressure sensor was 2.2 × $10^{−3}$ W/kPa and the linearity was 5.9 × $10^{−3}$. The sensor had a good performance and small volume, which can be used in the field of light pressure measurement and other fields that required the measurement small pressures, such as the biomedicine field. |
| Starting Page | 1321 |
| e-ISSN | 2072666X |
| DOI | 10.3390/mi13081321 |
| Journal | Micromachines |
| Issue Number | 8 |
| Volume Number | 13 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2022-08-15 |
| Access Restriction | Open |
| Subject Keyword | Micromachines Industrial Engineering Silicon On Insulator Pressure Sensor Mach–zehnder Interferometer Directional Coupler Ridge Waveguide |
| Content Type | Text |
| Resource Type | Article |
