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Germanium Quantum-Dot Array with Self-Aligned Electrodes for Quantum Electronic Devices
| Content Provider | MDPI |
|---|---|
| Author | Wang, I-Hsiang Hong, Po-Yu Peng, Kang-Ping Lin, Horng-Chih George, Thomas Li, Pei-Wen |
| Copyright Year | 2021 |
| Description | Semiconductor-based quantum registers require scalable quantum-dots (QDs) to be accurately located in close proximity to and independently addressable by external electrodes. Si-based QD qubits have been realized in various lithographically-defined Si/SiGe heterostructures and validated only for milli-Kelvin temperature operation. QD qubits have recently been explored in germanium (Ge) materials systems that are envisaged to operate at higher temperatures, relax lithographic-fabrication requirements, and scale up to large quantum systems. We report the unique scalability and tunability of Ge spherical-shaped QDs that are controllably located, closely coupled between each another, and self-aligned with control electrodes, using a coordinated combination of lithographic patterning and self-assembled growth. The core experimental design is based on the thermal oxidation of poly-SiGe spacer islands located at each sidewall corner or included-angle location of $Si_{3}N_{4}$/Si-ridges with specially designed fanout structures. Multiple Ge QDs with good tunability in QD sizes and self-aligned electrodes were controllably achieved. Spherical-shaped Ge QDs are closely coupled to each other via coupling barriers of $Si_{3}N_{4}$ spacer layers/c-Si that are electrically tunable via self-aligned poly-Si or polycide electrodes. Our ability to place size-tunable spherical Ge QDs at any desired location, therefore, offers a large parameter space within which to design novel quantum electronic devices. |
| Starting Page | 2743 |
| e-ISSN | 20794991 |
| DOI | 10.3390/nano11102743 |
| Journal | Nanomaterials |
| Issue Number | 10 |
| Volume Number | 11 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2021-10-16 |
| Access Restriction | Open |
| Subject Keyword | Nanomaterials Germanium Quantum Dot Self-aligned Electrode Scalability |
| Content Type | Text |
| Resource Type | Article |
