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Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film
| Content Provider | MDPI |
|---|---|
| Author | Qin, Zhen-Hui Wu, Shu-Mao Wang, Yong Liu, Kang-Fu Wu, Tao Yu, Si-Yuan Chen, Yan-Feng |
| Copyright Year | 2021 |
| Description | This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut $LiNbO_{3}$ film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating frequency over 5 GHz with an electromechanical coupling coefficient exceeding 50%. Compared with previously proposed YBAR with suspended structure, the proposed SM-YBAR can effectively suppress unwanted spurious modes with only a slight loss of the electromechanical coupling coefficient. The SM-YABR also provides better device stability, possible low-temperature drift coefficient, and a more convenient and mature device processing. It has the potential to meet the multiple requirements for the next generation signal processing devices in terms of high frequency, large bandwidth, stability, and low cost, etc. |
| Starting Page | 1039 |
| e-ISSN | 2072666X |
| DOI | 10.3390/mi12091039 |
| Journal | Micromachines |
| Issue Number | 9 |
| Volume Number | 12 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2021-08-29 |
| Access Restriction | Open |
| Subject Keyword | Micromachines Ybar Bulk Acoustic Resonator (bar) Solid Mounted Resonator (smr) Linbo3 Film |
| Content Type | Text |
| Resource Type | Article |
