NDLI: Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges

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Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges

Content Provider	MDPI
Author	Yan, Lan Jiang, Anna Jiang, Feng Liu, Guangda Wang, Fuzeng Wu, Xian
Copyright Year	2022
Abstract	The flexure hinge is a kind of micro-displacement adjustment device with application prospects because of its high displacement resolution, positioning accuracy and repeatability. In this study, a micro-displacement worktable with four degrees of freedom ( $\vec{X}$ , $\vec{Z}$ , $\overset{︵}{X}$ , $\overset{︵}{Z}$ ) was designed. The micro-displacement worktable was composed of three different flexure hinges. The adjustment ranges and adjustment accuracy of flexure hinges in terms of their respective degrees were improved. The micro-displacement worktable performance was examined by FEA (Finite Element Method). The maximum displacement that was adjusted in $\vec{X}$ and $\vec{Z}$ was 1.67 µm and 1.74 µm. The maximum angle adjusted in the $\overset{︵}{X}$ and $\overset{︵}{Z}$ direction was 14.90° and 18.58°. A test platform was developed for micro-displacement worktable performance tests. The simulation results showed a good agreement with the experimental results.
Starting Page	518
e-ISSN	2072666X
DOI	10.3390/mi13040518
Journal	Micromachines
Issue Number	4
Volume Number	13
Language	English
Publisher	MDPI
Publisher Date	2022-03-26
Access Restriction	Open
Subject Keyword	Micromachines Hardware and Architecturee Flexure Hinge Micro-displacement Four Degrees of Freedom Finite Element Simulation
Content Type	Text
Resource Type	Article

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