NDLI: Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams

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Buckling Electrothermal NEMS Actuators: Analytic Design for Very Slender Beams

Content Provider	MDPI
Author	Syms, Richard Liu, Dixi
Copyright Year	2022
Description	Analytic approximations are presented for the response of buckling-mode electrothermal actuators with very slender beams with a width-to-length ratio of $W/L\leq0.001$ of the type found in nanoelectromechanical systems (NEMS). The results are found as closed-form solutions to the Euler beam bending theory rather than by an iterative numerical solution or a time-consuming finite element analysis. Expressions for transverse deflections and stiffness are presented for actuators with the common raised cosine and chevron pre-buckled shapes. The approximations are valid when the effects of bending dominate over those of axial compression. A few higher-order approximations are also presented for less slender beams with $0.001\leqW/L\leq0.01$ .
Ending Page	67
Page Count	14
Starting Page	54
e-ISSN	26738023
DOI	10.3390/micro2010003
Journal	Micro
Issue Number	1
Volume Number	2
Language	English
Publisher	MDPI
Publisher Date	2022-01-13
Access Restriction	Open
Subject Keyword	Micro Industrial Engineering Electrothermal Actuator Beam Buckling Mems Nems
Content Type	Text
Resource Type	Article

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