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In-Situ Depth Measurement of Laser Micromachining
| Content Provider | MDPI |
|---|---|
| Author | Chen, Xiao Ming Xu, Ying Chen, Nan-Kuang Shy, Shannon Chui, Hsiang-Chen |
| Copyright Year | 2021 |
| Description | Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical detection system utilizing an optical confocal structure, experimentally confirmed to achieve a >95% accuracy for micron-diameter holes that are tens-of-microns deep. This system can be easily integrated into commercial laser micromachining processes, and can be employed in laser drilling and three-dimensional active-feedback laser printing. |
| Starting Page | 493 |
| e-ISSN | 23046732 |
| DOI | 10.3390/photonics8110493 |
| Journal | Photonics |
| Issue Number | 11 |
| Volume Number | 8 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2021-11-04 |
| Access Restriction | Open |
| Subject Keyword | Photonics Manufacturing Engineering Laser Machining Depth Measurement Confocal Structure |
| Content Type | Text |
| Resource Type | Article |