NDLI: Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

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Effect of Soft X-ray Irradiation on Film Properties of a Hydrogenated Si-Containing DLC Film

Content Provider	MDPI
Author	Kanda, Kazuhiro Imai, Ryo Tanaka, Shotaro Suzuki, Shuto Niibe, Masahito Hasegawa, Takayuki Suzuki, Tsuneo Akasaka, Hiroki
Copyright Year	2021
Description	The effect of soft X-ray irradiation on hydrogenated silicon-containing diamond-like carbon (Si-DLC) films intended for outer space applications was investigated by using synchrotron radiation (SR). We found that the reduction in film thickness was about 60 nm after 1600 mA·h SR exposure, whereas there was little change in their elemental composition. The reduction in volume was attributable to photoetching caused by SR, unlike the desorption of hydrogen in the case of exposure of hydrogenated DLC (H-DLC) film to soft X-rays. The ratio of the sp2 hybridization carbon and sp3 hybridization carbon in the hydrogenated Si-DLC films, sp2/(sp2 + sp3) ratio, increased rapidly from ~0.2 to ~0.5 for SR doses of less than 20 mA·h. SR exposure significantly changed the local structure of carbon atoms near the surface of the hydrogenated Si-DLC film. The rate of volume reduction in the irradiated hydrogenated Si-DLC film was 80 times less than that of the H-DLC film. Doping DLC film with Si thus suppresses the volume reduction caused by exposure to soft X-rays.
Starting Page	924
e-ISSN	19961944
DOI	10.3390/ma14040924
Journal	Materials
Issue Number	4
Volume Number	14
Language	English
Publisher	MDPI
Publisher Date	2021-02-15
Access Restriction	Open
Subject Keyword	Materials Nuclear Energy and Engineering Diamond-like Carbon Si Containing Diamond-like Carbon Film Soft X-ray Synchrotron Radiation X-ray Reflectivity Elastic Recoil Detection Analysis Rutherford Backscattering Spectrometry X-ray Photoelectron Spectroscopy Near-edge X-ray Absorption Fine Structure
Content Type	Text
Resource Type	Article

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