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Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line
| Content Provider | MDPI |
|---|---|
| Author | Chen, Chi Fu, Wenjie Zhang, Chaoyang Lu, Dun Han, Meng Yan, Yang |
| Copyright Year | 2021 |
| Description | A dual-frequency plasma source has many advantages in applications. In this paper, a dual-frequency microwave plasma source is presented. This microwave plasma source is based on a coaxial transmission line without the resonator, and it can be operated in a wide band frequency region. Two microwaves are inputted from two ports into the plasma reactor: one is used firstly to excite the plasma and the other one is used to adjust plasma characteristics. Based on the COMSOL Multiphysics simulation, the experiment is carried out. In the experimental investigation, the plasma electron density and electron temperature can be controlled, respectively, by feeding in different frequencies from the second port, causing the particles at different energy levels to present different frequencies. This exploratory research improves the operation frequency of dual-frequency microwave plasma sources from RF to microwave. |
| Starting Page | 9873 |
| e-ISSN | 20763417 |
| DOI | 10.3390/app11219873 |
| Journal | Applied Sciences |
| Issue Number | 21 |
| Volume Number | 11 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2021-10-22 |
| Access Restriction | Open |
| Subject Keyword | Applied Sciences Industrial Engineering Microwave Plasma Dual-frequency Plasma Electron Temperature Electron Density |
| Content Type | Text |
| Resource Type | Article |
