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Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices
| Content Provider | MDPI |
|---|---|
| Author | Christian, Pinto-Gómez Francesc, Pérez-Murano Marta, Fernández-Regúlez Bausells, Joan Villanueva, Luis |
| Copyright Year | 2020 |
| Description | Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we review the main principles of directed self-assembly of block copolymers and give a brief overview of some of the most extended applications. We present a novel fabrication route based on the introduction of directed self-assembly of block copolymers as a patterning option for the fabrication of nanoelectromechanical systems. As a proof of concept, we demonstrate the fabrication of suspended silicon membranes clamped by dense arrays of single-crystal silicon nanowires of sub-10 nm diameter. Resulting devices can be further developed for building up high-sensitive mass sensors based on nanomechanical resonators. |
| Starting Page | 2432 |
| e-ISSN | 20734360 |
| DOI | 10.3390/polym12102432 |
| Journal | Polymers |
| Issue Number | 10 |
| Volume Number | 12 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2020-10-21 |
| Access Restriction | Open |
| Subject Keyword | Polymers Polymer Science Block Copolymers Directed Self-assembly Graphoepitaxy Nanolithography Nanomechanical Devices Nanowires |
| Content Type | Text |
| Resource Type | Article |
