NDLI: Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research

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Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research

Content Provider	MDPI
Author	Dominik, Müller Graetz, Jonas Balles, Andreas Stier, Simon Hanke, Randolf Fella, Christian
Copyright Year	2021
Description	In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, we focus on a projection magnification system with a nano focus source. The imaging resolution is quantified with common 2D test structures and validated in 3D applications by means of the Fourier Shell Correlation. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, aging in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of composites. Thus, the laboratory system provides the unique possibility to image non-destructively structures in the range of 170–190 nanometers, even for high-density materials.
Starting Page	677
e-ISSN	20734352
DOI	10.3390/cryst11060677
Journal	Crystals
Issue Number	6
Volume Number	11
Language	English
Publisher	MDPI
Publisher Date	2021-06-12
Access Restriction	Open
Subject Keyword	Crystals Nano Ct Laboratory X-ray 3d Reconstruction Instrumentation Integrated Circuits Nondestructive Testing 3d X-ray Microscopy
Content Type	Text
Resource Type	Article

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