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Micro-Raman Characterization of Structural Features of High-k Stack Layer of SOI Nanowire Chip, Designed to Detect Circular RNA Associated with the Development of Glioma
| Content Provider | MDPI |
|---|---|
| Author | Ivanov, Yuri Malsagova, Kristina Popov, Vladimir Kupriyanov, Igor Pleshakova, Tatyana Galiullin, Rafael Ziborov, Vadim Dolgoborodov, Alexander Petrov, Oleg Miakonkikh, Andrey Rudenko, Konstantin Glukhov, Alexander Smirnov, Alexander Usachev, Dmitry Gadzhieva, Olga Bashiryan, Boris Shimansky, Vadim Enikeev, Dmitry Potoldykova, Natalia Archakov, Alexander |
| Copyright Year | 2021 |
| Description | The application of micro-Raman spectroscopy was used for characterization of structural features of the high-k stack (h-k) layer of “silicon-on-insulator” (SOI) nanowire (NW) chip (h-k-SOI-NW chip), including $Al_{2}O_{3}$ and $HfO_{2}$ in various combinations after heat treatment from 425 to 1000 °C. After that, the NW structures h-k-SOI-NW chip was created using gas plasma etching optical lithography. The stability of the signals from the monocrine phase of $HfO_{2}$ was shown. Significant differences were found in the elastic stresses of the silicon layers for very thick (>200 nm) $Al_{2}O_{3}$ layers. In the UV spectra of SOI layers of a silicon substrate with $HfO_{2}$, shoulders in the Raman spectrum were observed at 480–490 $cm^{−1}$ of single-phonon scattering. The h-k-SOI-NW chip created in this way has been used for the detection of DNA-oligonucleotide sequences (oDNA), that became a synthetic analog of circular RNA–circ-SHKBP1 associated with the development of glioma at a concentration of 1.1 × $10^{−16}$ M. The possibility of using such h-k-SOI NW chips for the detection of circ-SHKBP1 in blood plasma of patients diagnosed with neoplasm of uncertain nature of the brain and central nervous system was shown. |
| Starting Page | 3715 |
| e-ISSN | 14203049 |
| DOI | 10.3390/molecules26123715 |
| Journal | Molecules |
| Issue Number | 12 |
| Volume Number | 26 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2021-06-18 |
| Access Restriction | Open |
| Subject Keyword | Molecules Spectroscopy Nanowire Chip Soi Circular Rna Circ-shkbp1 Micro-raman Spectroscopy High-k Stack Layer |
| Content Type | Text |
| Resource Type | Article |
