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Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics
| Content Provider | MDPI |
|---|---|
| Author | Zeng, Desheng Liu, Qiang Mei, Chenyang Li, Hongwei Huang, Qingzhong Zhang, Xinliang |
| Copyright Year | 2022 |
| Description | A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × $10^{6}$, with a waveguide loss of approximately 0.28 dB/cm. For a resonator with 1.5-μm-wide waveguides, the average Q-factor reaches 1.20 × $10^{6}$, and the waveguide loss is 0.27 dB/cm. Moreover, we theoretically and experimentally show that a reduction in the waveguide loss significantly improves the conversion efficiency of four-wave mixing. A high four-wave mixing conversion efficiency of −17.0 dB is achieved at a pump power of 6.50 dBm. |
| Starting Page | 1155 |
| e-ISSN | 2072666X |
| DOI | 10.3390/mi13071155 |
| Journal | Micromachines |
| Issue Number | 7 |
| Volume Number | 13 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2022-07-21 |
| Access Restriction | Open |
| Subject Keyword | Micromachines Q-factor Soi Microring Resonator Four-wave Mixing Conversion Efficiency |
| Content Type | Text |
| Resource Type | Article |
