NDLI: Growth Temperature Influence on Atomic-Layer-Deposited $In_{2}O_{3}$ Thin Films and Their Application in Inorganic Perovskite Solar Cells

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Growth Temperature Influence on Atomic-Layer-Deposited $In_{2}O_{3}$ Thin Films and Their Application in Inorganic Perovskite Solar Cells

Content Provider	MDPI
Author	Farva, Umme Lee, Hyeong Woo Kim, Ri-Na Lee, Dong-Gun Kang, Dong-Won Kim, Jeha
Copyright Year	2021
Description	Recently, indium oxide $(In_{2}O_{3}$) thin films have emerged as a promising electron transport layer (ETL) for perovskite solar cells; however, solution-processed $In_{2}O_{3}$ ETL suffered from poor morphology, pinholes, and required annealing at high temperatures. This research aims to carry out and prepare pinhole-free, transparent, and highly conductive $In_{2}O_{3}$ thin films via atomic layer deposition (ALD) seizing efficiently as an ETL. In order to explore the growth-temperature-dependent properties of $In_{2}O_{3}$ thin film, it was fabricated by ALD using the triethyl indium $(Et_{3}$In) precursor. The detail of the ALD process at 115–250 °C was studied through the film growth rate, crystal structure, morphology, composition, and optical and electrical properties. The film growth rate increased from 0.009 nm/cycle to 0.088 nm/cycle as the growth temperature rose from 115 °C to 250 °C. The film thickness was highly uniform, and the surface roughness was below 1.6 nm. Our results confirmed that film’s structural, optical and electrical properties directly depend on film growth temperature. Film grown at ≥200 °C exhibited a polycrystalline cubic structure with almost negligible carbon impurities. Finally, the device $ALD-In_{2}O_{3}$ film deposited at 250 °C exhibited a power conversion efficiency of 10.97% superior to other conditions and general $SnO_{2}$ ETL.
Starting Page	2047
e-ISSN	20794991
DOI	10.3390/nano11082047
Journal	Nanomaterials
Issue Number	8
Volume Number	11
Language	English
Publisher	MDPI
Publisher Date	2021-08-11
Access Restriction	Open
Subject Keyword	Nanomaterials Atomic Layer Deposition In2o3 Xps Analysis Electrical Properties Electron Transport Layer Cspbi2br Perovskite Solar Cells
Content Type	Text
Resource Type	Article

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