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High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams
| Content Provider | MDPI |
|---|---|
| Author | Vetter, Christian Giust, Remo Furfaro, Luca Billet, Cyril Froehly, Luc Courvoisier, Francois |
| Copyright Year | 2021 |
| Description | Controlling the formation of high aspect ratio void channels inside glass is important for applications like the high-speed dicing of glass. Here, we investigate void formation using ultrafast Bessel beams in the single shot illumination regime. We characterize the morphology of the damages as a function of pulse energy, pulse duration, and position of the beam inside fused silica, Corning Eagle XG, and Corning Gorilla glass. While a large set of parameters allow for void formation inside fused silica, the operating window is much more restricted for Eagle XG and Gorilla glass. The transient formation of a molten layer around voids enables us interpreting the evolution of the morphology with pulse energy and duration. |
| Starting Page | 6749 |
| e-ISSN | 19961944 |
| DOI | 10.3390/ma14226749 |
| Journal | Materials |
| Issue Number | 22 |
| Volume Number | 14 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2021-11-09 |
| Access Restriction | Open |
| Subject Keyword | Materials Glass Ultrafast Laser Processing Bessel Beam |
| Content Type | Text |
| Resource Type | Article |
