NDLI: Design and Characterization of a High Resolution Microfluidic Heat Flux Sensor with Thermal Modulation

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Design and Characterization of a High Resolution Microfluidic Heat Flux Sensor with Thermal Modulation

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Design and Characterization of a High Resolution Microfluidic Heat Flux Sensor with Thermal Modulation

Content Provider	MDPI
Author	Nam, Sung-Ki Kim, Jung-Kyun Cho, Sung-Cheon Lee, Sun-Kyu
Abstract	A complementary metal-oxide semiconductor-compatible process was used in the design and fabrication of a suspended membrane microfluidic heat flux sensor with a thermopile for the purpose of measuring the heat flow rate. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, a low pass filter, and a lock-in amplifier can yield a resolution 20 nW with a sensitivity of 461 V/W. The thermal modulation method is used to eliminate low-frequency noise from the sensor output, and various amounts of fluidic heat were applied to the sensor to investigate its suitability for microfluidic applications. For sensor design and analysis of signal output, a method of modeling and simulating electro-thermal behavior in a microfluidic heat flux sensor with an integrated electronic circuit is presented and validated. The electro-thermal domain model was constructed by using system dynamics, particularly the bond graph. The electro-thermal domain system model in which the thermal and the electrical domains are coupled expresses the heat generation of samples and converts thermal input to electrical output. The proposed electro-thermal domain system model is in good agreement with the measured output voltage response in both the transient and the steady state.
File Size	1303552
Ending Page	6611
Page Count	18
Starting Page	6594
File Format	PDF
e-ISSN	14248220
DOI	10.3390/s100706594
Journal	Sensors
Issue Number	7
Volume Number	10
Language	English
Publisher Date	2010-07-09
Access Restriction	Open
Subject Keyword	heat flux sensor thermopile electro-thermal domain model microfluidic application
Content Type	Text
Resource Type	Article

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