NDLI: Waveguide-integrated MEMS-based phase shifter for phased array antenna

Content Provider	IET Digital Library
Author	Baghchehsaraei, Zargham Vorobyov, Alexander Åberg, Jan Fourn, Erwan Sauleau, Ronan Oberhammer, Joachim
Abstract	This study investigates a new concept of waveguide-based W-band phase shifters for applications in phased array antennas. The phase shifters are based on a tuneable bilateral finline bandpass filter with 22 microelectromechanical system (MEMS) switching elements, integrated into a custom-made WR-12 waveguide with a replaceable section, whose performance is also investigated in this study. The individual phase states are selected by changing the configuration of the switches bridging the finline slot in specific positions; this leads to four discrete phase states with an insertion loss predicted by simulations better than 1 dB, and a phase shift span of about 270°. MEMS chips have been fabricated in fixed positions, on a pair of bonded 300 µm high-resistivity silicon substrates, to prove the principle, that is, they are not fully functional, but contain all actuation and biasing-line elements. The measured phase states are 0, 56, 189 and 256°, resulting in an effective bit resolution of 1.78 bits of this nominal 2 bit phase shifter at 77 GHz. The measured insertion loss was significantly higher than the simulated value, which is assumed to be attributed to narrow-band design of the devices as the influences of fabrication and assembly tolerances are shown to be negligible from the measurement results.
Starting Page	235
Ending Page	243
Page Count	9
ISSN	17518725
Volume Number	8
e-ISSN	17518733
Issue Number	Issue 4, Mar (2014)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-map/8/4
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-map.2013.0256
Journal	IET Microwaves, Antennas & Propagation
Publisher Date	2013-11-27
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Analogue Circuit Antenna Array Antenna Phased Array Assembly Tolerance Band-pass Filter Biasing-line Element Bit Resolution Custom-made WR-12 Waveguide Design And Modelling of MEMS And NEMS Device Discrete Phase State Elemental Semiconductor Fabrication of MEMS And NEMS Device Fabrication Tolerance Filter And Other Network Finline Slot Frequency 77 GHz High-resistivity Silicon Substrates Insertion Loss MEMS Chips MEMS Switching Element Microswitches Microwave Circuit And Device Millimetre Wave Antenna Array Millimetre Wave Filter Millimetre Wave Phase Shifters Narrow-band Design Phase Shift Span Phased Array Antenna Relay And Switches Silicon Size 300 Mum Tuneable Bilateral Finline Bandpass Filter Waveguide And Microwave Transmission Line Component Waveguide Filter Waveguide-based W-band Phase Shifters Waveguide-integrated Microelectromechanical System
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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