Please wait, while we are loading the content...
Please wait, while we are loading the content...
| Content Provider | IET Digital Library |
|---|---|
| Author | Cho, Si Hyeong Lee, Jung Hwan Park, Jin Goo |
| Abstract | Different shapes of silicon (Si) nanotip arrays using reactive ion etching with various mask patterns were fabricated, and the surface profile, surface roughness and quantitative etch characteristics of the Si nanotip were characterised. It was found that the geometry as well as etch characteristics of Si nanotip arrays could be modified by changing the initial mask patterns. Pyramidal and conical shaped Si nanotips could be obtained from square and circular mask patterns, respectively. The alternate square array pattern resulted in a Si nanotip with a wavy array whereas the honeycomb mask pattern resulted in a Si nanotip in a hexagonal array. In terms of etch rate, the circular pattern mask showed faster etching than the square patterns. Also, the parallel pattern showed faster etching than the alternate pattern under the same conditions. The tip size and height of Si nanotip structures determined by atomic force microscopy measurement were in the range of 50–80 and 450–750 nm, respectively. |
| Starting Page | 27 |
| Ending Page | 31 |
| Page Count | 5 |
| Volume Number | 8 |
| e-ISSN | 17500443 |
| Issue Number | Issue 1, Jan (2013) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/8/1 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2012.0834 |
| Journal | Micro & Nano Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | AFM Alternate Square Array Pattern Atomic Force Microscopy Atomic Force Microscopy Measurement Circular Mask Pattern Conical Shaped Si Nanotip Elemental Semiconductor Etch Rate Hexagonal Array Honeycomb Mask Pattern Initial Mask Pattern Masks Method of Nanofabrication And Processing Nanofabrication Nanometre-Scale Semiconductor Fabrication Technology NanoParticle Nanostructured Material Nanotube And Nanostructured Material Parallel Pattern Plasma Application in Manufacturing And Material Processing Pyramidal Shaped Si Nanotip Quantitative Etch Characteristic Reactive Ion Etching Semiconductor Growth Semiconductor Technology Si Nanotip Array Fabrication Si Nanotip Structure Silicon Silicon Nanotip Array Shapes Size 20 Nm to 80 Nm Size 450 Nm to 750 Nm Solid Surface Structure Sputter Etching Square Mask Pattern Structure of Solid Clusters Surface Profile Surface Resistance Measurement Surface Topography Measurement Surface Treatment And Coating Technique Tip Height Tip Size Wavy Array |
| Content Type | Text |
| Resource Type | Article |
National Digital Library of India (NDLI) is a virtual repository of learning resources which is not just a repository with search/browse facilities but provides a host of services for the learner community. It is sponsored and mentored by Ministry of Education, Government of India, through its National Mission on Education through Information and Communication Technology (NMEICT). Filtered and federated searching is employed to facilitate focused searching so that learners can find the right resource with least effort and in minimum time. NDLI provides user group-specific services such as Examination Preparatory for School and College students and job aspirants. Services for Researchers and general learners are also provided. NDLI is designed to hold content of any language and provides interface support for 10 most widely used Indian languages. It is built to provide support for all academic levels including researchers and life-long learners, all disciplines, all popular forms of access devices and differently-abled learners. It is designed to enable people to learn and prepare from best practices from all over the world and to facilitate researchers to perform inter-linked exploration from multiple sources. It is developed, operated and maintained from Indian Institute of Technology Kharagpur.
Learn more about this project from here.
NDLI is a conglomeration of freely available or institutionally contributed or donated or publisher managed contents. Almost all these contents are hosted and accessed from respective sources. The responsibility for authenticity, relevance, completeness, accuracy, reliability and suitability of these contents rests with the respective organization and NDLI has no responsibility or liability for these. Every effort is made to keep the NDLI portal up and running smoothly unless there are some unavoidable technical issues.
Ministry of Education, through its National Mission on Education through Information and Communication Technology (NMEICT), has sponsored and funded the National Digital Library of India (NDLI) project.
| Sl. | Authority | Responsibilities | Communication Details |
|---|---|---|---|
| 1 | Ministry of Education (GoI), Department of Higher Education |
Sanctioning Authority | https://www.education.gov.in/ict-initiatives |
| 2 | Indian Institute of Technology Kharagpur | Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project | https://www.iitkgp.ac.in |
| 3 | National Digital Library of India Office, Indian Institute of Technology Kharagpur | The administrative and infrastructural headquarters of the project | Dr. B. Sutradhar bsutra@ndl.gov.in |
| 4 | Project PI / Joint PI | Principal Investigator and Joint Principal Investigators of the project |
Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon |
| 5 | Website/Portal (Helpdesk) | Queries regarding NDLI and its services | support@ndl.gov.in |
| 6 | Contents and Copyright Issues | Queries related to content curation and copyright issues | content@ndl.gov.in |
| 7 | National Digital Library of India Club (NDLI Club) | Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach | clubsupport@ndl.gov.in |
| 8 | Digital Preservation Centre (DPC) | Assistance with digitizing and archiving copyright-free printed books | dpc@ndl.gov.in |
| 9 | IDR Setup or Support | Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops | idr@ndl.gov.in |
|
Loading...
|