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| Content Provider | IET Digital Library |
|---|---|
| Author | Shao, Ligeng Du, Liqun Wang, Liding |
| Abstract | Microelectroforming is a modern manufacturing process for producing metal microstructures in the field of microelectronic mechanical systems. Electrochemical activation of the substrate surfaces can enhance the adhesion strength between the electroforming layer and the substrate at the first stage of microelectroforming. The mechanism of current density affecting the activation of the substrate surfaces was explored. The cathodic overpotential was carried out with the chronopotentiometric method under different current density conditions. The current density at the first stage of microelectroforming was the largest contributor to the electrochemical activation of the substrate surfaces. As the current density was set in the range of 0.2–1.2 A/dm2, effective electrochemical activation occurred on the substrate surfaces. Although the current density was 0.4 A/dm2, the effect of substrate activation is optimal and the adhesion strength between the electroforming layer and the substrate reached its maximum. |
| Starting Page | 872 |
| Ending Page | 876 |
| Page Count | 5 |
| Volume Number | 8 |
| e-ISSN | 17500443 |
| Issue Number | Issue 12, Dec (2013) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/8/12 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2013.0484 |
| Journal | Micro & Nano Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Adhesion Adhesion Strength Cathodic Overpotential Chronopotentiometric Method Copper Current Density Electrochemical Activation Electrochemistry And Electrophoresis Electroforming Fabrication of MEMS And NEMS Device Forming Processes Manufacturing Process Mechanical Engineering Metal MicroStructure Microelectroforming Microelectronic Mechanical System Microfabrication Micromechanical And Nanomechanical Device And System Micromechanical Device Micromechanics Ni Nickel Other Specific Mechanical Property (mechanical Engineering) Other Topics in Material Science Preparation of Metals And Alloy Semiconductor Technology Substrate Activation Substrate SurFace Surface Topography Measurement Surface Treatment Surface Treatment And Degradation of Metals And Alloy |
| Content Type | Text |
| Resource Type | Article |
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