NDLI: Submillimeter-wave waveguide filters fabricated by SU-8 process and laser micromachining

Content Provider	IET Digital Library
Author	Shang, Xiaobang Yang, Hao Glynn, David Lancaster, Michael J.
Abstract	For terahertz systems, rectangular waveguide is an ideal low loss medium for interconnectivity and the construction of passive circuits. A drawback when manufacturing waveguides at submillimeter wavelengths is the demanding tolerances due to small dimensions. For example, a WR-3 waveguide (operating between 220 and 325 GHz) has a cross-sectional dimension of just 864 by 432 µm, and higher frequency waveguides get proportionally smaller. An additional challenge is that whether using waveguide for passive circuits such as filters, there are additional structures inside the waveguide which are significantly smaller than the waveguide itself. Traditionally, computer numerical control (CNC) milling has been used for waveguides, however at terahertz frequencies this is difficult to utilise. Emerging technologies for terahertz waveguides are compared with conventional CNC solutions. The technologies include the photolithography-based polymer etching of waveguides using SU-8 photoresist, and the laser machining of metal. Both have shown promise, and good quality terahertz passive components have been fabricated and measured.
Starting Page	2027
Ending Page	2034
Page Count	8
ISSN	17518725
Volume Number	11
e-ISSN	17518733
Issue Number	Issue 14, Nov (2017)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-map/11/14
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-map.2016.0951
Journal	IET Microwaves, Antennas & Propagation
Publisher Date	2017-08-17
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	CNC Milling Computer Numerical Control Milling Electronics Industry Frequency 220 GHz to 325 GHz General Fabrication Technique Laser Beam Machining Laser Material Processing Laser Micromachining Low Loss Medium Machining Micromachining Passive Circuit Passive Filter Passive Network Quality Terahertz Passive Component Rectangular Waveguide SU-8 Photoresist Process Submillimeter Wavelengths Submillimeter-wave Waveguide Filter Submillimetre Wave Filter Terahertz System Terahertz Waveguide Waveguide And Microwave Transmission Line Component Waveguide Filter WR-3 Waveguide
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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