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| Content Provider | IET Digital Library |
|---|---|
| Author | Lin, Qijing Zhao, Na Jiang, Zhuangde Meng, Qingzhi Chen, Feng |
| Abstract | Metal-sandwiched zinc oxide (ZnO)/titanium (Ti)/copper (Cu)/Ti/ZnO thin film systems were fabricated using magnetron sputtering technology and then annealed using a rapid thermal annealing system at temperatures from 100 to 400°C. The influence of the Ti film thicknesses and annealing temperatures on the surface morphologies, sheet resistance and optical properties were studied. The surface morphologies change a little with the annealing temperature rises. The sheet resistances reduce with the Ti film thickness or annealing temperature increasing. Both the max transmittance and figure of merit reduce with the increase of Ti film thickness. The max transmittance increases with the temperature increasing from 100 to 300°C and then reduces. However, the figure of merit increases with the temperature increasing which indicates that the metal-sandwiched ZnO/Ti/Cu/Ti/ZnO thin film system annealed at 400°C has the optimal performance. |
| Starting Page | 1511 |
| Ending Page | 1515 |
| Page Count | 5 |
| Volume Number | 13 |
| e-ISSN | 17500443 |
| Issue Number | Issue 11, Nov (2018) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/13/11 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2018.5234 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2018-11-01 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Annealing Processes Annealing Processes in Semiconductor Technology Condensed Matter Copper Deposition by Sputtering Electrical Conductivity Electrical Property Electrical Property of II-VI And III-V Semiconductors Electrical Property of Metal-nonmetal Contacts Electrical Property of Metals And Metallic Alloys (thin Films/low-dimensional Structures) Electrical Resistivity Epitaxy Figure of Merit II-VI And III-V SemiConductor II-VI SemiConductor Magnetron Sputtering Technology Metal-sandwiched Transparent Conductive Thin Film Metallic Thin Film Optical Constants And Parameter Optical Property Optical Property of II-VI And III-V SemiConductor Optical Property of Metals And Metallic Alloy Rapid Thermal Annealing Semiconductor Metal Boundaries Semiconductor Metal InterFace Semiconductor Thin Film Sheet Resistance Solid Surface Structure Sputter Deposition Structure Surface Modulator/Detector Array Surface Morphologies Temperature 100 DegC to 400 DegC Thin Film Growth Titanium Transparency Wide Band Gap SemiConductor Zinc Compound ZnO-Ti-Cu-Ti-ZnO |
| Content Type | Text |
| Resource Type | Article |
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