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Content Provider | IET Digital Library |
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Author | Tsai, J. T. H. Hsu, Chia Hsiang Hsu, Chia Yun Yang, Chu Shou |
Abstract | The fabrication of gallium oxide nanodots for the application of resistive random access memory (RRAM) using a process of atomic force microscopy (AFM) local anodic oxidation on an indium tin oxide conductive glass substrate is reported. In the atmospheric environment, an AFM probe tip contacts the gallium film locally. This gallium oxide nanodot acts as the insulator layer in a single unit of the RRAM. The structure describes the insulator layer (GaOx) sandwiched by the top (AFM tip) and bottom (Ga film) electrodes. Using current and voltage biased methods, the device switches from a high-resistance state (HRS) to a low-resistance state (LRS) and reset from LRS to HRS. Low read-voltage is used to distinguish the high/low resistance to present the digital data. Presented results show the ability of atomic force microscopy anodic oxidation to produce 300 nm diameter gallium oxide nanodots on glass substrates for potentially high density RRAMs. |
Starting Page | 554 |
Ending Page | 555 |
Page Count | 2 |
ISSN | 00135194 |
Volume Number | 49 |
e-ISSN | 1350911X |
Issue Number | Issue 8, Apr (2013) |
Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/el/49/8 |
Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/el.2013.0639 |
Journal | Electronics Letters |
Access Restriction | Open |
Rights Holder | © The Institution of Engineering and Technology |
Subject Keyword | AFM Probe Contacts Anodisation Atmospheric Environment Atomic Force Microscopy Bottom Electrodes Conductive Glass Substrate Current Biased Method Data Gallium Compound GaOx High-resistance State HRS Indium Compound Insulator Layer ITO Local Anodic Oxidation Low Read-voltage Low-resistance State LRS Memory Circuit Nanodots Random-access Storage Resistive Random Access Memory RRAM Synthesis Semiconductor Storage Semiconductor Technology Size 300 Nm Surface Topography Measurement Tin Compound Top Electrodes Voltage Biased Method |
Content Type | Text |
Resource Type | Article |
Subject | Electrical and Electronic Engineering |
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