NDLI: Silica aerogel thick film, an alternative to micromachined air gap for thermal insulation

Content Provider	IET Digital Library
Author	Seyedjalali, M. Madani, M. R.
Abstract	A uniform, smooth and crack-free multilayer silica aerogel film as thick as 5 µm is successfully coated on top of a silicon wafer. The multilayer spin-coated aerogel film was made possible by using the present authors' recently developed novel state-of-the-art aerogel processing technique. The utilisation of the thick aerogel film for the thermal insulation of a microhotplate (µHP) is studied. The super heat insulator aerogel can replace the micromachined air cavity conventionally created under µHPs for the fabrication of metal oxide gas sensors. The thermal insulation capability of the unique aerogel film was investigated by measuring the temperature of the nichrome heaters built on the aerogel coated silicon wafers at different applied powers. The temperature coefficient of the resistivity of the heaters was measured by monitoring the change in the resistance of the heaters at different temperatures. Simulations were also performed using COMSOL multiphysics software for verification of the experimental results, showing good agreement.
Starting Page	849
Ending Page	850
Page Count	2
ISSN	00135194
Volume Number	51
e-ISSN	1350911X
Issue Number	Issue 11, May (2015)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/el/51/11
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/el.2015.0088
Journal	Electronics Letters
Publisher Date	2015-05-13
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Aerogel Processing Technique Aerogels Chemical Sensor Chemical Variables Measurement COMSOL Multiphysics Software Crack-free Multilayer Silica Aerogel Thick Film Gas Sonsor Gels And Sols Insulation And Insulating Coatings Metal Oxide Gas Sensor Microfabrication Microhot-plate Micromachined Air Gap Microsensor Microsensors And Nanosensors MOX Gas Sensor Multilayer Spin Coated Aerogel Nichrome Heater Silicon Compound SiO Spin Coating Super Heat Insulator Aerogel Temperature Measurement Temperature Sonsor Thermal Insulating Material Thermal Insulation Thermal Variables Measurement Thermometry Thick Film Sonsor ΜHP
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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