NDLI: Vertical SiC taper with a small angle fabricated by slope transfer method

Content Provider	IET Digital Library
Author	Xin, Yu Pandraud, Gregory French, Paddy J.
Abstract	In this Letter, a slope transfer method to fabricate vertical waveguide couplers is proposed. This method utilises wet etched Si as a mask, and takes advantage of dry etching selectivity between Si and SiC, to successfully transfer the profile from the Si master into SiC. By adopting this method, a <2° slope is achieved. Such a taper can bring the coupling efficiency in SiC waveguides to 80% (around 1 dB loss) or better from around 10% (10 dB loss) without taper. It further increases the alignment tolerance at the same time, which ensures the successful development of a plug-and-play solution for optical sensing. This is the first reported taper made in SiC.
Starting Page	661
Ending Page	663
Page Count	3
ISSN	00135194
Volume Number	55
e-ISSN	1350911X
Issue Number	Issue 11, May (2019)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/el/55/11
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/el.2019.0232
Journal	Electronics Letters
Publisher	The Institution of Engineering and Technology
Publisher Date	2019-04-26
Access Restriction	Open
Rights License	Creative Commons Attribution -Non Commercial License (http://creativecommons.org/licenses/by-nc/3.0/)
Subject Keyword	Couplers Coupling Efficiency Dry Etching Selectivity Elemental Semiconductor Etching Integrated Optics Optical Couplers Optical Fabrication Optical Waveguide Si Master SiC Waveguide SiC-Si Silicon Silicon Compound Slope Transfer Method Surface Grinding Vertical SiC Taper Vertical Waveguide Couplers Wet Etched Si Wide Band Gap SemiConductor
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Vertical SiC taper with a small angle fabricated by slope transfer method

Low-loss inverted taper edge coupler in silicon nitride

Compound switch consisting of gap-variable silicon nanowire waveguide couplers

Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction

Fabrication of integrated waveguide turning mirror on silicon-on-insulator

Fabrication of photonic crystal structure in fluorine-doped silicon dioxide film by dry and wet etching processes

Low-Loss Silicon Waveguides and Grating Couplers Fabricated Using Anisotropic Wet Etching Technique

Broadband two-mode multiplexer with taper-etched directional coupler on SOI platform

Mid-infrared suspended waveguide platform and building blocks

Vertical SiC taper with a small angle fabricated by slope transfer method

Similar Documents

Vertical SiC taper with a small angle fabricated by slope transfer method

Low-loss inverted taper edge coupler in silicon nitride

Compound switch consisting of gap-variable silicon nanowire waveguide couplers

Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction

Fabrication of integrated waveguide turning mirror on silicon-on-insulator

Fabrication of photonic crystal structure in fluorine-doped silicon dioxide film by dry and wet etching processes

Low-Loss Silicon Waveguides and Grating Couplers Fabricated Using Anisotropic Wet Etching Technique

Broadband two-mode multiplexer with taper-etched directional coupler on SOI platform

Mid-infrared suspended waveguide platform and building blocks

Vertical SiC taper with a small angle fabricated by slope transfer method