NDLI: A method for electrical calibration of MEMS accelerometers through multivariate regression

Content Provider	IEEE Xplore Digital Library
Author	Dumas, N. Azais, F. Mailly, F. Nouet, P.
Copyright Year	2009
Description	Author affiliation: Laboratoire d'Informatique, de Robotique et de Microélectronique de Montpellier (LIRMM), Université Montpellier II / CNRS, 161 Rue Ada, 34392 Cedex 5, France (Dumas, N.; Azais, F.; Mailly, F.; Nouet, P.)
Abstract	This paper is the follow-up of the research we conduct to find an alternative way to measure the sensitivity of capacitive MEMS accelerometers. The goal is to be able to perform production test and calibration using only an electrical test bench, i.e. without applying acceleration. In the previously published study, we introduced three parameters that can be measured through electrical means and that are related to the accelerometer sensitivity through analytical expressions. However some restrictive assumptions were made on the conditioning electronic of the accelerometer. In this paper, the design for test capability needed to implement the measurement is discussed and improvement of the method is presented. It is based on a new set of electrical parameters that can be more easily measured and a MARS regression algorithm to find the relation between these parameters and the sensitivity. The method is evaluated through Monte Carlo simulations.
Starting Page	1
Ending Page	6
File Size	559751
Page Count	6
File Format	PDF
ISBN	9781424446186
DOI	10.1109/IMS3TW.2009.5158685
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Accelerometers Performance evaluation Mars Electric variables measurement Production Life estimation Multivariate regression Calibration Testing
Content Type	Text
Resource Type	Article

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