NDLI: Effect of metallization on RF properties of PZT-based transmission lines

Content Provider	IEEE Xplore Digital Library
Author	Nadzar, H.M. Sulaiman, S. Salleh, M.K.M. Awang, Z.
Copyright Year	2011
Description	Author affiliation: Microwave Technology Centre, Faculty of Electrical Engineering, Universiti Teknologi MARA, Shah Alam, 40450 Selangor, Malaysia (Nadzar, H.M.; Sulaiman, S.; Salleh, M.K.M.; Awang, Z.)
Abstract	This paper describes the material parameters which affect high frequency transmission lines built on ferroelectric lead zirconate titanate (PZT) thin films. The electrical characteristics of two transmission line (TL) structures, namely microstrip (MS) and coplanar waveguide (CPW), were studied over 1 to 20 GHz using electromagnetic simulation and verified through measurement. The characteristics were studied by simulating the insertion loss of the lines using four different types of metals namely Pt, Au, Ni and W. The effect of metallization on rf properties was due to metal conductivity and skin effect. The length of the line was set constant at 100 µm and the electrode thickness 0.1 µm, the PZT thickness was 0.5 µm. The relative permittivities of PZT used for MS and CPW were 87 and 112 respectively. The dielectric properties of the PZT films were obtained from previous capacitance measurements over the said frequency range. Results of this study show that the structures exhibit similar performance, with Pt showing the lowest loss for all given electrodes. These results suggest Pt as the preferred conductor for building transmission lines and circuit elements on PZT-based microwave integrated circuits (MIC).
Starting Page	424
Ending Page	429
File Size	795970
Page Count	6
File Format	PDF
ISBN	9781457716287
e-ISBN	9781457716317
DOI	10.1109/RFM.2011.6168782
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-12-12
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gold microstrip and co-planar transmission lines Insertion loss Transmission line measurements Conductors Propagation losses Loss measurement Coplanar waveguides skin effect microwave integrated circuit Lead zirconate titanate
Content Type	Text
Resource Type	Article

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