NDLI: Analysis of thickness-extensional modes in energy-trapped thin film resonators

Content Provider	IEEE Xplore Digital Library
Author	Zi-nan Zhao Zheng-hua Qian Bing Wang Jia-shi Yang
Copyright Year	2015
Description	Author affiliation: State Key Lab. of Mech. & Control of Mech. Struct., Nanjing Univ. of Aeronaut. & Astronaut., Nanjing, China (Zi-nan Zhao; Zheng-hua Qian; Bing Wang) \|\| Dept. of Mech. & Mater. Eng., Univ. of Nebraska-Lincoln, Lincoln, NE, USA (Jia-shi Yang)
Abstract	A theoretical analysis on a rectangular energy-trapped piezoelectric thin zinc oxide film resonator operating with thickness-extensional modes is performed in this paper. The two-dimensional scalar differential equations derived by Tiersten and Stevens are used which can describe the in-plane mode distribution. Based on the scalar equations, we construct a variational formulation which provides a theoretical foundation for the Ritz method in our analysis. Free vibration frequencies and corresponding mode shapes are obtained and discussed. Modes with vibration mainly under the electroded area are proved to exist. The results show that the classical method with an approximation of neglecting the four corner regions can cause a frequency error on the order of dozens of parts per million for the fundamental thickness-extensional modes, which is significant for the design and operation of the FBARs.
Starting Page	9
Ending Page	13
File Size	1144889
Page Count	5
File Format	PDF
ISBN	9781479988075
DOI	10.1109/SPAWDA.2015.7364429
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-10-30
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Vibrations Thin film resonator Thickness-extensional modes Films Resonant frequency Zinc oxide Ritz method Mathematical model Film bulk acoustic resonators Energy trapping
Content Type	Text
Resource Type	Article

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