NDLI: Measurement of piezoelectric material's surface acoustic wave electromechanical coupling cofficient by delay lines

Content Provider	IEEE Xplore Digital Library
Author	Xiao-yang Chen Zi-kun Fan Hui Zhang
Copyright Year	2008
Description	Author affiliation: Beijing Changfeng SAW Co. Ltd., Beijing (Xiao-yang Chen; Zi-kun Fan; Hui Zhang)
Abstract	The surface acoustic wave electromechanical coupling coefficient $K_{s}$ $^{2}$ of piezoelectric material expresses the energy exchange efficiency of surface acoustic wave and electrical field. It is also a significant parameter for development of piezoelectric material and surface acoustic wave devices design and fabrication. Two kinds pattern of double delay lines were designed. The first is a surface acoustic wave double delay lines with free surface, in order to calculate $V_{f}.$ The second is a surface acoustic wave double delay lines with metallized surface, in order to calculate $V_{m}.$ Both of the delay lines were fabricated on the same wafer, then sampling some devices for delay time measurement by Agilent E5062A vector network analyzer. The average of $V_{f}$ and $V_{m}$ were calculated respectively. The $K_{s}$ $^{2}$ was calculated using above-mentioned formula. The test and calculation were completed with 128deg Y-X $LiNbO_{3},$ 6deg Y-X $LiNbO_{3},$ Y-Z $LiNbO_{3}$ and X-112deg $YLiTaO_{3},$ 36deg Y-X $LiTaO_{3}$ respectively. The results accord with Sadao measure's results in the materials integration.
Starting Page	538
Ending Page	541
File Size	259961
Page Count	4
File Format	PDF
ISBN	9781424428915
DOI	10.1109/SPAWDA.2008.4775847
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-12-05
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Piezoelectric material Metallization Energy exchange electromechanical coupling coefficient Surface acoustic wave devices surface acoustic wave Fabrication delay lines Piezoelectric materials Surface acoustic waves Delay lines Acoustic measurements Sampling methods Acoustic waves
Content Type	Text
Resource Type	Article

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