NDLI: Improvement in dissolution contrast of positive-tone photo-definable poly(benzoxazole) materials

Content Provider	IEEE Xplore Digital Library
Author	Matsukawa, D. Yoshizawa, A. Enomoto, T. Mizuno, K. Matsuie, N. Ohe, M.
Copyright Year	2015
Description	Author affiliation: Tsukuba Res. Lab., Hitachi Chem. Co., Ltd., Hitachi, Japan (Matsukawa, D.; Yoshizawa, A.; Enomoto, T.) \|\| Yamazaki R&D Center, Hitachi Chem. DuPont Microsyst., Ltd., Hitachi, Japan (Mizuno, K.; Matsuie, N.; Ohe, M.)
Abstract	Positive-tone photo-definable poly(benzoxazole) (PBO) has been widely used as dielectric for re-distribution layer of wafer level chip size package. This material can simplify the manufacturing process and ensure the reliability owing to its good mechanical properties and high thermal stability. However, lithographic performance of conventional photo-definable PBO is not enough mainly due to low dissolution contrast, and the pattern formation on the substrate with deep gap structure is often difficult. Then, in order to improve lithographic performance by enhancing dissolution contrast, we re-designed photo-definable component. As a result, dissolution contrast could be doubled in comparison to conventional PBO by applying contrast activator or more effective diazonaphthoquinone (DNQ) and we could obtain lithographic pattern on the substrate with deep gap structure without residue at the bottom of the gap. In addition, modified PBO also showed good cured film properties even when cured at low temperature below 250 °C.
Starting Page	12
Ending Page	15
File Size	863180
Page Count	4
File Format	PDF
ISBN	9781479988143
e-ISBN	9781479988150
DOI	10.1109/ICSJ.2015.7357347
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-11-09
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radiation effects Temperature Adhesives Films polybenzoxazole Polymers deep gap Chemicals Thermal stability dissolution contrast
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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