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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Xin Li Kawashima, K. Kagawa, T. |
| Copyright Year | 2008 |
| Description | Author affiliation: Tokyo Inst. of Technol., Yokohama (Xin Li; Kawashima, K.; Kagawa, T.) |
| Abstract | Vortex levitation can achieve non-contact handling by blowing air into a vortex cup through a tangential nozzle to generate a swirling air flow. In this paper, its dynamic characteristics are analyzed through dynamic pressure response, and a dynamic modeling is developed and verified experimentally. First, we observe the pressure dynamic response inside the cup by making the cup and the work piece relatively move sinusoidally at various frequencies. It is found that pressure transient response is very rapid so that pressure change follows the gap thickness change very well. Moreover, the annular skirt of the vortex cup entraps a thin air layer to give rise to a pressure hysteresis due to squeeze film air damping while the work piece repeating sinusoidal movement relatively to the cup. Next, according to those experimental observations, a spring-damper model is proposed by considering the lifting force caused by swirling air flow and the resistive force related to squeeze film air damping separately. Finally, the validity of the proposed model is confirmed by comparing the experimental results and analytical results in loading processes. |
| Starting Page | 218 |
| Ending Page | 224 |
| File Size | 624548 |
| Page Count | 7 |
| File Format | |
| ISBN | 9781424417865 |
| DOI | 10.1109/ASC-ICSC.2008.4675358 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-10-10 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Damping Semiconductor device modeling Transient response Semiconductor films Stability Atmosphere Production Levitation Frequency Cyclones |
| Content Type | Text |
| Resource Type | Article |
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