NDLI: Sensor-Based Control for Semiconductor Manufacturing Plasma EtchingAsA ProcessVehicle

Content Provider	IEEE Xplore Digital Library
Author	Terry Jr., F.L. Freudenberg, J. Elta, M. Giles, M. Grizzle, J. LaFortune, S. Kabamba, P. Khargonekar, P. Meerkov, S. Teneketzis, D.
Copyright Year	1992
Starting Page	106
Ending Page	116
File Size	591444
Page Count	11
File Format	PDF
DOI	10.1109/IWLR.1992.657992
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1992-10-25
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Plasma materials processing Fabrication Real time systems Plasma applications Manufacturing processes Process control Automatic generation control Semiconductor device manufacture Control systems Etching
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Sensor-Based Control for Semiconductor Manufacturing Plasma EtchingAsA ProcessVehicle