NDLI: Analysis, Simulation and Testing of a Micromirror with Rotational Serpentine Springs

Content Provider	IEEE Xplore Digital Library
Author	Jianliang You Packirisamy, M. Stiharu, I.
Copyright Year	2005
Description	Author affiliation: Dept. of Mech. & Ind. Eng., Concordia Univ., Montreal, Que. (Jianliang You; Packirisamy, M.; Stiharu, I.)
Abstract	In this paper, a 2-DOF model for electrostatically actuated torsional micromirrors with relatively soft stiff rotational serpentine springs is presented. The analytical stiffness formulae for this rotational serpentine spring are also presented. FEA simulations for static performance have been verified by the experimental values. Such validation was implemented through fabrication of the micromirror on a SOI wafer by MicraGEM micromachining process, PSD sensor based test set-up for static properties, and the corresponding tests. Due to the soft stiffness of rotational serpentine springs designed, the fabricated torsional micromirror could be rotated to some angle under low applied bias. The simulated pull-in voltage 17.2 V is close to the actual value but much smaller than those of previously reported large size torsional micromirrors. The deviation of the simulated static displacements from experimental results could be mainly due to the tolerance of fabrication, the slender beam and linear structural assumptions. However, with relatively lower applied voltages of actuation, these torsional micromirrors that use the rotational serpentine springs can be integrated on the same microchip with CMOS circuits, showing their promising potential for industrial applications
Starting Page	219
Ending Page	225
File Size	3766812
Page Count	7
File Format	PDF
ISBN	0780395883
DOI	10.1109/ICISIP.2005.1619439
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-12-14
Publisher Place	India
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Analytical models Micromachining Voltage Mirrors Optical sensors Springs Electrostatics Micromirrors Testing
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Design and fabrication of micromirror array supported by vertical springs

Design, fabrication, and performance analysis of MEMS mirror with sidewall electrodes

Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

High fill-factor micromirror array and its fabrication process

Design and fabrication of a micromirror using silicon bulk micromachining for out-of-plane right angle reflection

A rotational comb-driven micromirror with a large deflection angle and low drive voltage

Electrostatic digital micromirror using interdigitated cantilevers

Bulk micromachined electrostatic beam steering micromirror array

Nonlinear Rotational Spring with Tension for Stabilizing Electrostatically Driven Micromirror

Analysis, Simulation and Testing of a Micromirror with Rotational Serpentine Springs

Similar Documents

Design and fabrication of micromirror array supported by vertical springs

Design, fabrication, and performance analysis of MEMS mirror with sidewall electrodes

Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniques

High fill-factor micromirror array and its fabrication process

Design and fabrication of a micromirror using silicon bulk micromachining for out-of-plane right angle reflection

A rotational comb-driven micromirror with a large deflection angle and low drive voltage

Electrostatic digital micromirror using interdigitated cantilevers

Bulk micromachined electrostatic beam steering micromirror array

Nonlinear Rotational Spring with Tension for Stabilizing Electrostatically Driven Micromirror

Analysis, Simulation and Testing of a Micromirror with Rotational Serpentine Springs