NDLI: Laser direct-writing of Bragg gratings waveguides on porous silicon

Content Provider	IEEE Xplore Digital Library
Author	Marino, A. Rea, I. Iodice, M. Coppola, G. Rendina, I. De Stefano, L.
Copyright Year	2008
Description	Author affiliation: CNISM & Phys. Sci. Dept., Univ. of Naples Federico II, Naples (Marino, A.; Rea, I.) \|\| Inst. for Microelectron. & Microsyst.-Dept. of Naples, Nat. Council of Res., Naples (Iodice, M.; Coppola, G.; Rendina, I.; De Stefano, L.)
Abstract	In this work we present the realization through a laser oxidation process of a Bragg grating over a porous silicon (PSi) waveguide. In the last years, the possibility of patterning the Porous Silicon (PSi) with photolithographic processes has been investigated in silicon micromachining. Unfortunately, the masking process of PSi by using standard photoresist presents remarkable difficulties since the low resistance of the polymer to the electrochemical process. The PSi localized laser oxidation process is a good and cheaper alternative to the traditional photolithographic method to realize micropatterned structures. We exploited this technique to realize a Bragg grating. The morphological characteristic of the structure, constituted by 50 periods with a pitch of 10 mum, has been investigated by optical microscopy and profilometric technique. The transmission spectrum of the structure has been measured and compared with the calculated one by using the transfer matrix method and the slab waveguide modal calculation.
Starting Page	177
Ending Page	179
File Size	121371
Page Count	3
File Format	PDF
ISBN	9781424419739
DOI	10.1109/CAOL.2008.4671927
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-09-29
Publisher Place	Ukraine
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	porous silicon waveguides Micromachining Bragg grating Electrochemical processes Optical waveguides Bragg gratings laser writing Optical microscopy Waveguide lasers Resists Silicon Oxidation Polymers
Content Type	Text
Resource Type	Article

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