NDLI: Aging and doping effects of nano-structured MgxZn1−xO thin films for CNT applications

Content Provider	IEEE Xplore Digital Library
Author	Ahmad, R. Salina, M. Teh, A.A. Kara, M. Rusop, M. Awang, Z.
Copyright Year	2010
Description	Author affiliation: Nano-Electronic Technology (NET), Faculty of Electrical Engineering, Universiti Teknologi MARA, Shah Alam, 40450 Selangor, Malaysia (Salina, M.; Rusop, M.) \|\| Microwave Technology Centre, Universiti Teknologi MARA, Shah Alam, 40450 Selangor, Malaysia (Ahmad, R.; Teh, A.A.; Kara, M.; Awang, Z.)
Abstract	This paper reports on the preparation of nano-structured of MgxZn1−xO thin films by sol-gel spin coating method which will be used as a template layer to grow carbon nanotubes. The MgxZn1−xO films were deposited on Pt/Si (100) substrates. In this work, we focused on the effect of sol aging and Mg content on the film structure and resistivity. Sols with Mg content of x = 0.1, 0.3 and 0.5 were subjected to aging times of between 3 to 240 hours. X-Ray Diffractometer (XRD), energy dispersive analysis by X-ray (EDAX), scanning (SEM) and field emission scanning electron (FESEM) microscopes were used to characterize the structural properties. Results from SEM and FESEM show the thickness and grain size increased with aging up to 240 hours. XRD spectrum reveals the deposited thin films were polycrystalline wurtzite structure. The element of Mg in the ZnO films was confirmed by EDAX. The electrical resistivity also increased with aging time as confirmed by four point probe method. The results suggest that appropriate aging of the sol is important for improving structure quality and electrical performance of MgxZn1−xO thin films.
Starting Page	405
Ending Page	409
File Size	1389236
Page Count	5
File Format	PDF
ISBN	9781424486472
e-ISBN	9781424486489
DOI	10.1109/SCORED.2010.5704032
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-12-13
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	X-ray scattering Films carbon nanotubes Platinum Aging Silicon sol aging time MgZnO sol-gel thin films
Content Type	Text
Resource Type	Article

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