NDLI: TCAD tools for efficient 3D simulations of geometry effects in floating-gate structures

Content Provider	IEEE Xplore Digital Library
Author	Saad, Y. Tavernier, C. Ciappa, M. Fichtner, W.
Copyright Year	2004
Description	Author affiliation: Integrated Eng. Syst. AG, Zurich, Switzerland (Saad, Y.)
Abstract	In the present work, we demonstrate the use of appropriate 3D TCAD tools for process emulation and device simulation of floating-gate structures under consideration of process-induced geometry effects. The floating to control gate capacitance of representative dummy structures is extracted by full 3D simulation, with particular focus on effects related to the sidewall oxide, the spacer, and the bending radius of the polysilicon edges. The proposed methodology is assessed and compared with methods currently used in the industry. All simulations are performed by an innovative device simulation tool, a 3D process emulator, and a mesh generator that generates boundary-conforming meshes, allowing for very fine descriptions of the complex geometry.
Sponsorship	Nat. Aeronautics and Space Adm. (NASA) Air Force Res. Lab. (AFRL) Defense Threat Reduction Agency (DTRA)
Starting Page	77
Ending Page	82
File Size	727708
Page Count	6
File Format	PDF
ISBN	0780387260
DOI	10.1109/NVMT.2004.1380810
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-11-17
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Geometry Solid modeling Nonvolatile memory Computational modeling Emulation Predictive models Capacitance Systems engineering and theory Doping profiles Mesh generation
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
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