NDLI: Etching characteristics of PZT thin films and via hole patterning for MMIC capacitors

Content Provider	IEEE Xplore Digital Library
Author	Bakar, R.A. Awang, Z. Lazim, N.F.M. Sulaiman, S. Noor, U.M. Dollah, A.
Copyright Year	2007
Description	Author affiliation: Microwave Technol. Center, Univ. Teknol. MARA, Shah Alam (Bakar, R.A.; Awang, Z.; Lazim, N.F.M.; Sulaiman, S.; Noor, U.M.; Dollah, A.)
Abstract	This paper reports on the etching characteristics of lead zirconate titanate (PZT) thin films and their subsequent employment in thin film capacitors for microwave integrated circuits. Via holes to provide ground paths were constructed using electron beam lithography (EBL) and wet chemical etching. Various compositions of wet etchant were investigated and the images of etched areas were examined in order to find the most suitable etchant for PZT thin films. The successful etched via holes were metallized with 800 A Au using sputtering technique. The via holes were then subjected to a continuity test before characterized using 10 times 10 and 20times 20 $mum^{2}$ capacitor structures at microwave frequencies. From the scanning electron microscopy (SEM) images obtained, etching using the composition of $0.5HF:5HCl:10NH_{4}Cl:50H_{2}O$ resulted in the best results. The traces obtained in Smith chart confirmed that via holes were successfully fabricated on PZT thin films and the contact resistance of the via holes were measured to be between 7 - 20 Omega.
Starting Page	1
Ending Page	4
File Size	3563706
Page Count	4
File Format	PDF
ISBN	9781424414345
DOI	10.1109/APACE.2007.4603972
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-12-04
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microwave integrated circuits ceramic thin films Capacitors microwave integrated circuits Hafnium PZT etching Microwave theory and techniques Microwave circuits Etching Chemicals
Content Type	Text
Resource Type	Article

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